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We examined, in backward (reflection) geometry, the generation of the 3rd and5th harmonics, located in the deep and vacuum ultraviolet, on the surface ofsilicon and on the interface between silicon and silica when a thin silica filmwas grown on a silicon substrate. In both cases, a strong dependence of theharmonic signal on the polarization direction of the driving laser beam wasfound. The differences observed for both samples, are qualitatively explained.Furthermore, a simplified tensor formalism for the polarization dependence isintroduced, which reveals the structural symmetry of the surface and theinterface and describes the polarization dependence with high accuracy. Thestudy is an essential step to further understand nonlinear interaction andnonperturbative harmonic generation on the boundaries of materials.

Probing the surface of silicon and the silicon-silica interface using nonperturbative third and fifth harmonic generation