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Compression of micro-pillars is followed in situ by a quick nano-focusedX-ray scanning microscopy technique combined with three-dimensional reciprocalspace mapping. Compared to other attempts using 2 X-ray nanobeams, it avoidsany motion or vibration that would lead to a destruction of the sample. Thetechnique consists of scanning both the energy of the incident nano-focusedX-ray beam and the in-plane translations of the focusing optics along the X-raybeam. Here, we demonstrate the approach by imaging the strain and latticeorientation of Si micro-pillars and their pedestals during in situ compression.Varying the energy of the incident beam instead of rocking the sample andmapping the focusing optics instead of moving the sample supplies avibration-free measurement of the reciprocal space maps without removal of themechanical load. The maps of strain and lattice orientation are in goodagreement with the ones recorded by ordinary rocking-curve scans.Variable-wavelength quick scanning X-ray microscopy opens the route for in situstrain and tilt mapping towards more diverse and complex materialsenvironments, especially where sample manipulation is difficult.

Variable-wavelength quick scanning nano-focused X-ray microscopy for in situ strain and tilt mapping