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The epitaxial growth of functional materials using a substrate with agraphene layer is a highly desirable method for improving structural qualityand obtaining free-standing epitaxial nano-membranes for scientific study,applications, and economical reuse of substrates. However, the aggressiveoxidizing conditions typically employed to grow epitaxial perovskite oxides candamage graphene. Here, we demonstrate a technique based on hybrid molecularbeam epitaxy that does not require an independent oxygen source to achieveepitaxial growth of complex oxides without damaging the underlying graphene.The technique produces films with self-regulating cation stoichiometry controland epitaxial orientation to the oxide substrate. Furthermore, the films can beexfoliated and transferred to foreign substrates while leaving the graphene onthe original substrate. These results open the door to future studies ofpreviously unattainable free-standing nano-membranes grown in anadsorption-controlled manner by hybrid molecular beam epitaxy, and haspotentially important implications for the commercial application of perovskiteoxides in flexible electronics.

Free-Standing Epitaxial SrTiO$_3$ Nanomembranes via Remote Epitaxy using Hybrid Molecular Beam Epitaxy