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We performed the experimental and theoretical study of the heating anddamaging of ruthenium thin films induced by femtosecond laser irradiation.Results of an optical pump-probe thermoreflectance experiment with rotatingsample allowing to significantly reduce heat accumulation in irradiated spotare presented. We show the evolution of surface morphology from growth of aheat-induced oxide layer at low and intermediate laser fluences to cracking andgrooving at high fluences. Theoretical analysis of pump-probe signal allows usto relate behavior of hot electrons in ruthenium to the Fermi smearingmechanism. The analysis of heating is performed with the two-temperaturemodeling and molecular dynamics simulation, results of which demonstrate thatthe calculated melting threshold is higher than experimental damage threshold.We attribute it to heat-induced surface stresses leading to cracking whichaccumulates to more severe damage morphology. Our results provide an upperlimit for operational conditions for ruthenium optics and also direct tofurther studies of the Fermi smearing mechanism in other transition metals.

Laser-induced electron dynamics and surface modification in ruthenium thin films