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Femtosecond pulsed lasers have been widely used over the past decades due totheir capability to fabricate precise patterns at the micro- and nano- lengthsscales. A key issue for efficient material processing is the determination ofthe laser parameters used in the experimental set ups. Despite a systematicinvestigation that has been performed to highlight the impact of everyparameter independently, little attention has been drawn on the role of thesubstrate material on which the irradiated solid is placed. In this work, theinfluence of the substrate is emphasised for films of various thicknesses whichdemonstrates that both the optical and thermophysical properties of thesubstrate affect the thermal fingerprint on the irradiated film while theimpact is manifested to be higher at smaller film sizes. Two representativematerials, silicon and fused silica have been selected as typical substratesfor thin films of different optical and thermophysical behaviour (gold andnickel) and the thermal response and damage thresholds are evaluated for theirradiated solids. The pronounced influence of the substrate is aimed to pavethe way for new and more optimised designs of laser-based fabrication set upsand processing schemes.

The impact of the substrate on the opto-thermal response of thin metallic targets following irradiation with femtosecond laser pulses