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The Transition Edge Sensor is extremely sensitive to the change oftemperature, combined with the high-Z metal of a certain thickness, it canrealize the high energy resolution measurement of particles such as X-rays.X-rays with energies below 10 keV have very weak penetrating ability, so only afew microns thick of gold or bismuth can obtain quantum efficiency higher than70\%. Therefore, the entire structure of the TES X-ray detector in this energyrange can be realized in the microfabrication process. However, for X-rays orgamma rays from 10 keV to 200 keV, sub-millimeter absorber layers are required,which cannot be realized by microfabrication process. This paper first brieflyintroduces a set of TES X-ray detectors and their auxiliary systems built byShanghaiTech University, then focus on the introduction of the TES $\gamma$-raydetector, with absorber based on an sub-millimeter lead-tin alloy sphere. Thedetector has a quantum efficiency above 70\% near 100 keV, and an energyresolution of about 161.5eV@59.5keV.

Transition edge sensor based detector: from X-ray to $\gamma$-ray