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For modern IC design, electromagnetic coupling among interconnect wires playsan increasingly important role in signoff analysis. The requirement of fast andaccurate capacitance extraction is becoming more and more urgent.The criticalstep of extracting capacitance among interconnect wires is solving electricfield. However, due to the high computational complexity, solving electricfield is extreme timing-consuming. To improve computational efficiency, wepropose a Galerkin boundary element method (GBEM) to extract capacitance. Theadvantage of this method is that it can greatly reduce the number of boundaryelements on the premise of ensuring that the error is small enough. As aconsequence, the matrix order of the discretization equation will alsodecrease. The experiments in this paper have proved this advantage of ouralgorithm. Moreover, we have took advantage of some mathematical theorems inthis paper. Our attempt shows that there will be more connections between thecapacitance extraction and some mathematical conception so that we can use moremathematical tools to solve the problems of capacitance extraction.

GBEM: Galerkin Boundary Element Method for 3-D Capacitance Extraction