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A central requirement for photonic quantum information processing systemslies in the combination of nonclassical light sources and low-loss,phase-stable optical modes. While substantial progress has been made separatelytowards ultra-low loss, $\leq1$ dB/m, chip-scale photonic circuits and highbrightness single-photon sources, integration of these technologies hasremained elusive. Here, we report a significant advance towards this goal, inthe hybrid integration of a quantum emitter single-photon source with awafer-scale, ultra-low loss silicon nitride photonic integrated circuit. Wedemonstrate triggered and pure single-photon emission directly into aSi$_3$N$_4$ photonic circuit with $\approx1$ dB/m propagation loss at awavelength of $\approx920$ nm. These losses are more than two orders ofmagnitude lower than reported to date for any photonic circuit with on-chipquantum emitter sources, and $>50$ % lower than for any priorfoundry-compatible integrated quantum photonic circuit, to the best of ourknowledge. Using these circuits we report the observation of resonancefluorescence in the strong drive regime, a milestone towards integratedcoherent control of quantum emitters. These results constitute an importantstep forward towards the creation of scaled chip-integrated photonic quantuminformation systems.

Triggered single-photon generation and resonance fluorescence in ultra-low loss integrated photonic circuits