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High throughput characterization and processing techniques are becomingincreasingly necessary to navigate multivariable, data-driven design challengesfor sensors and electronic devices. For two-dimensional materials, deviceperformance is highly dependent upon a vast array of material propertiesincluding number of layers, lattice strain, carrier concentration, defectdensity, and grain structure. In this work, laser-crystallization was used tolocally pattern and transform hundreds of regions of amorphous MoS2 thin filmsinto 2D 2H-MoS2. A high throughput Raman spectroscopy approach was subsequentlyused to assess the process-dependent structural and compositional variationsfor each illuminated region, yielding over 5500 distinct non-resonant,resonant, and polarized Raman spectra. The rapid generation of a comprehensivelibrary of structural and compositional data elucidated important trendsbetween structure-property-processing relationships involvinglaser-crystallized MoS2, including the relationships between grain size, grainorientation, and intrinsic strain. Moreover, extensive analysis ofstructure/property relationships allowed for intelligent design, and evaluationof major contributions to, device performance in MoS2 chemical sensors. Inparticular, it is found that sensor performance is strongly dependent on theorientation of the MoS2 grains relative to the crystal plane.

High throughput data-driven design of laser crystallized 2D MoS2 chemical sensors