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Phthalocyanines as organic semiconductors and molecular magnets provideplenty of industrial or high-tech applications from dyes and pigments up to gassensors, molecular electronics, spintronics and quantum computing. Copperphthalocyanine (CuPc) belongs among the most used phthalocyanines, typically inthe form of powder or films but self-grown nanowires are also known. Here wedescribe an opposite, i.e., top-down approach based on fabrication of orderedarrays of CuPc microstructures (microdisks) using electron beam lithography andother steps. Among critical points of this approach belongs a choice of aproper resist and a solvent. Fabricated CuPc microdisks have a diameter of 5${\mu}$m and heights from 7 up to 70 nm. Micro-Raman spectroscopy of the filmsand microdisks reveals a crystalline ${\beta}$ phase associated with aparamagnetic form. Additional measurements with an increasing laser power showa significant shift (${\Delta}{\omega}$ ~ 7.1 cm$^{-1}$ ) and broadening of apeak at 1532 rel$\cdot$cm$^{-1}$ corresponding to the phonon B1g mode. Theobserved smooth changes exclude a phase transition and confirm the thermallystable polymorph. Our versatile fabrication technique using the commonlithographic resist brings new possibilities for the fabrication of variousmicro/nanostructures such as micromagnets, heterostructures or organicelectronic devices.

Fabrication and micro-Raman spectroscopy of arrays of copper phthalocyanine molecular-magnet microdisks