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Optical modulators are required to have high modulation bandwidths and acompact footprint. In this paper we experimentally demonstrate a novelSi/In$_2$O$_3$ hybrid plasmonic waveguide modulator, which is realized by anasymmetric directional coupler (ADC) consisting of a silicon photonic waveguideand a Si/In$_2$O$_3$ hybrid plasmonic waveguide. The optical signal ismodulated by radio-frequency (RF) signal applied on the Au electrodes at thetop of MOS capacitor and contacting the In$_2$O$_3$ thin film. The record-highmodulation bandwidth of >40 GHz is realized by a silicon-doping-freemetal-oxide-In$_2$O$_3$ capacitor integrated in a 3.5-$\mu$m-long asymmetricdirectional coupler (ADC) for the first time.

Ultra-compact Si/In$_2$O$_3$ hybrid plasmonic waveguide modulator with a high bandwidth beyond 40 GHz