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Excitations of MHz acoustic modes are studied numerically in 10-um-thicksilicon disk membranes with a radius of 100 and 500 um actuated by an attached1-um-thick (AlSc)N thin-film transducer. It is shown how higher-harmonicmembrane modes can be excited selectively and efficiently by appropriatepatterning of the transducer electrodes. When filling the half-space above themembrane with a liquid, the higher-harmonic modes induce acoustic pressurefields in the liquid with interference patterns that result in the formation ofa single, strong trapping region located 50 - 100 um above the membrane, wherea single suspended cell can be trapped in all three spatial directions. Thetrapping strength depends on the acoustic contrast between the cell and theliquid, and as a specific example it is shown by numerical simulation that byusing a 60% iodixanol solution, a cancer cell can be held in the trap.

Numerical study of acoustic cell trapping above elastic membrane disks  driven in higher-harmonic modes by thin-film transducers with patterned  electrodes