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Silicon, a ubiquitous material in modern computing, is an emerging platformfor realizing a source of indistinguishable single-photons on demand. Theintegration of recently discovered single-photon emitters in silicon intophotonic structures, is advantageous to exploit their full potential forintegrated photonic quantum technologies. Here, we show the integration oftelecom photon emitters in a photonic platform consisting of siliconnanopillars. We developed a CMOS-compatible nanofabrication method, enablingthe production of thousands of individual nanopillars per square millimeterwith state-of-the-art photonic-circuit pitch, all the while being free offabrication-related radiation damage defects. We found a waveguiding effect ofthe 1278 nm-G center emission along individual pillars accompanied by improvedbrightness, photoluminescence signal-to-noise ratio and photon extractionefficiency compared to that of bulk silicon. These results unlock clearpathways to monolithically integrating single-photon emitters into a photonicplatform at a scale that matches the required pitch of quantum photoniccircuits.

A photonic platform hosting telecom photon emitters in silicon