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Integrated mid-infrared micro-spectrometers have a great potential forapplications in environmental monitoring and space exploration.Silicon-on-insulator (SOI) is a promising platform to tackle this integrationchallenge, due to its unique capability for large volume and low-costproduction of ultra-compact photonic circuits. However, the use of SOI in themid-infrared is restricted by the strong absorption of the buried oxide layerfor wavelengths beyond 4 {\mu}m. Here, we overcome this limitation by utilizingmetamaterial-cladded suspended silicon waveguides to implement a spatialheterodyne Fourier-transform (SHFT) spectrometer operating near 5.5{\mu}mwavelength. The metamaterial-cladded geometry allows removal of the buriedoxide layer, yielding measured propagation loss below 2 dB/cm between 5.3{\mu}mand 5.7{\mu}m wavelengths. The SHFT spectrometer comprises 19 Mach-Zehnderinterferometers with a maximum arm length imbalance of 200 {\mu}m, achieving ameasured spectral resolution of 13cm-1 and a free-spectral range of 100 cm-1near 5.5{\mu}m wavelength.

Mid-infrared Fourier-transform spectrometer based on metamaterial lateral cladding suspended silicon waveguides