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We demonstrate fully crystalline, single-mode ultrahigh quality factorintegrated microresonators comprising epitaxially grown Si$_{0.86}$Ge$_{0.14}$waveguide cores with silicon claddings. These waveguides support resonanceswith internal $Q >10^8$ for both polarization modes, a nearlyorder-of-magnitude improvement over that seen in prior integrated Si photonicsplatforms. The maximum $Q$ is $1.71\pm0.06 \times 10^8$ for the transversemagnetic (TM) polarization mode, corresponding to a loss of $0.39\pm0.02$ dB/m.Together with silicon's strong Kerr nonlinearity and low losses in the optical,microwave and acoustic regimes, our results could lead to theSi$_{1-x}$Ge$_x$/Si architecture unlocking important new avenues for Kerrfrequency combs, optomechanics, and quantum transduction.

Ultrahigh-$Q$ on-chip silicon-germanium microresonators