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Miniature varifocal lenses are crucial for many applications requiringcompact optical systems. Here, utilizing electro-mechanically actuated 0.5-mmaperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters)focal length tuning with an actuation voltage below 40 V. This constitutes thelargest focal length tuning in any low-power electro-mechanically actuatedmeta-optic, enabled by the high energy density in comb-drive actuatorsproducing large displacements at relatively low voltage. The demonstrateddevice is produced by a novel nanofabrication process that accommodatesmeta-optics with a larger aperture and has improved alignment betweenmeta-optics via flip-chip bonding. The whole fabrication process is CMOScompatible and amenable to high-throughput manufacturing.

Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication