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The structure and chemistry of grain boundaries (GBs) are crucial indetermining polycrystalline materials' properties. Faceting and solutesegregation to minimize the GB energy is a commonly observed phenomenon. Inthis paper, a deposition process to obtain pure tilt GBs in titanium (Ti) thinfilms is presented. By increasing the power density, a transition frompolycrystalline film growth to a maze bicrystalline Ti film on SrTiO$_3$ (001)substrate is triggered. All the GBs in the bicrystalline thin film arecharacterized to be $\Sigma$13 [0001] coincident site lattice (CSL) boundaries.The GB planes are seen to distinctly facet into symmetric {$\bar{7}520$} andasymmetric {$10\bar{1}0$} // {$11\bar{2}0$} segments of 20-50~nm length.Additionally, EDS reveals preferential segregation of iron (Fe) in everyalternate symmetric {$\bar{7}520$} segment. Both the faceting and thesegregation are explained by a difference in the CSL density between the facetplanes. Furthermore, in the GB plane containing Fe segregation, atom probetomography is used to experimentally determine the GB excess solute to be1.25~atoms/nm$^{2}$. In summary, the study reveals for the first time amethodology to obtain bicrystalline Ti thin films with strong faceting andanisotropy in iron (Fe) segregation behaviour within the same family of planes.

Microstructure, grain boundary evolution and anisotropic Fe segregation in (0001) textured Ti thin films