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The discharge structure of inductively coupled plasma is studied via fluidsimulation and analytic theory collaboration. At low pressure, the discharge isstratified by the double layer, which is modelled as dipole moment. Theparabolic profile is formed in the discharge core when recombination loss isnegligible and both the electron and anions are the Boltzmann balanced. Atincreasing the pressure, the main characteristics, i.e., parabolic, ellipticand flat-topped profile, are experienced, predicted by the simulation andanalytics. Self-coagulation is accompanied at all considered pressures. It ismore a chemistry process and provides new means of constricting plasma. At itsinfluence, electron density deviates from the Boltzmann equilibrium. Forsatisfying the neutrality of bulk plasma, the ambi-polar self-coagulationmechanism is suggested. At high pressure, the self-coagulation-to-coil schemecauses the mass point behavior in the plasma. Minor cations re-self-coagulateat certain conditions and the correlation with the celestial bodies formationis hypothesized.

Study of transport process and discharge structure of inductively coupled electronegative plasmas via fluid model and analytic theory collaboration