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Epitaxial Sc$_x$Al$_{1-x}$N thin films of ~100 nm thickness grown on metalpolar GaN exhibit significantly enhanced relative dielectric permittivity($\epsilon_r$) values relative to AlN. $\epsilon_r$ values of ~17 to 21 for Sccontents of 17 to 25% (x=0.17 to 0.25) measured electrically bycapacitance-voltage (CV) measurements at 500 kHz frequency indicateSc$_x$Al$_{1-x}$N has the largest relative dielectric permittivity of anyexisting nitride material. This points toward the usage of Sc$_x$Al$_{1-x}$N aspotential epitaxial, single-crystalline dielectric material that can bedeposited in situ on GaN and AlN electronic and photonic devices for enhancedperformance.

Epitaxial Sc$_x$Al$_{1-x}$N on GaN is a High K Dielectric