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Monolithic integration of multiband (1.4~ 6.0 GHz) RF acoustic devices weresuccessfully demonstrated within the same process flow by using the lithiumniobate (LN) thin film on silicon carbide (LNOSiC) substrate. A novel surfacemode with sinking energy distribution was proposed, exhibiting reducedpropagation loss. Surface wave and Lamb wave resonators with suppressedtransverse modes and leaky modes were demonstrated, showing scalable resonancesfrom 1.4 to 5.7 GHz, electromechanical coupling coefficients (k2) between 7.9%and 29.3%, and maximum Bode-Q (Qmax) larger than 3200. Arrayed filters with asmall footprint (4.0 x 2.5 mm2) but diverse center frequencies (fc) and 3-dBfractional bandwidths (FBW) were achieved, showing fc from 1.4 to 6.0 GHz, FBWbetween 3.3% and 13.3%, and insertion loss (IL) between 0.59 and 2.10 dB. Theseresults may promote the progress of hundred-filter sub-6 GHz RF front-endmodules (RF-FEMs).

Monolithic Integrated Multiband Acoustic Devices on Heterogeneous Substrate for Sub-6 GHz RF-FEMs