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Optomechanical resonators were fabricated on a silicon-on-insulator (SOI)substrate that had been implanted with phosphorus donors. The resonators'mechanical and optical properties were then measured (at 6 kelvin and roomtemperature) before and after the substrate was annealed. All measuredresonators survived the annealing and their mechanical linewidths decreasedwhile their optical and mechanical frequencies increased. This is consistentwith crystal lattice damage from the ion implantation causing the optical andmechanical properties to degrade and then subsequently being repaired by theannealing. We explain these effects qualitatively with changes in the siliconcrystal lattice structure. We also report on some unexplained features in thepre-anneal samples. In addition, we report partial fabrication ofoptomechanical resonators with neon ion milling.

The effects of ion implantation damage to photonic crystal optomechanical resonators in silicon