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Low energy ion scattering is a technique to detect the energy of ions whichare scattered from a surface. For noble gas ions, it is predominantly sensitiveto the topmost surface layer due to strong neutralisation processes. Dependingon the combination of projectile ion and target material, the scatteringspectra can exhibit contributions resulting from multiple scattering processesin deeper layers when probing ions are re-ionised on the exiting trajectory.These events cause a pronounced continuum located toward lower scatteringenergies with respect to the direct scattering peak. In a previous work asemi-empirical formula has been given which allows fitting and derivation ofquantitative information from the measured spectra [Nelson 1986 J. Vac. Sci.Technol. A 4 1567-1569]. Based on the former work an improved formula isderived which has less numerical artefacts and is numerically more stable.

Derivation of an Improved Semi-empirical Expression for the Re-ionisation Background in Low Energy Ion Scattering Spectra