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Atomic force microscopy (AFM) has been constantly supporting nanosciences andnanotechnologies for over 30 years, being present in many fields from condensedmatter physics to biology. It enables measuring very weak forces at thenanoscale, thus elucidating interactions at play in fundamental processes. Herewe leverage the combined benefits of micro/nanoelectromechanical systems andcavity optomechanics to fabricate a sensor for dynamic mode AFM at a frequencyabove 100 MHz. This is two decades above the fastest commercial AFM probes,suggesting opportunity for measuring forces at timescales unexplored so far.The fabrication is achieved using very-large scale integration technologiesinherited from photonic silicon circuits. The probe's ring optomechanicalcavity is coupled to a 1.55 um laser light and features a 130 MHz mechanicalresonance mode with a quality factor of 900 in air. A limit of detection indisplacement of 3.10-16 m/sqrt(Hz) is obtained, enabling the detection of theBrownian motion of the probe and paving the way for force sensing experimentsin the dynamic mode with a working vibration amplitude in the picometer range.Inserted in a custom AFM instrument embodiment, this optomechanical sensordemonstrates the capacity to perform force-distance measurements and tomaintain a constant interaction strength between tip and sample, an essentialrequirement for AFM applications. Experiments show indeed a stable closed-loopoperation with a setpoint of 4 nN/nm for an unprecedented sub-picometervibration amplitude, where the tip-sample interaction is mediated by astretched water meniscus.

Very high frequency probes for atomic force microscopy with silicon optomechanics