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Lithium niobate on insulator (LNOI) is extensively researched for potentialapplications in telecommunication, sensing and quantum technology. Low-losswaveguides in LNOI have been demonstrated in recent years, with further worksinvestigating their nonlinear optical properties via electric field poling. Thefabrication imperfections and minimum feature size of inverted ferroelectricdomains currently limit the efficiency and application of nonlinear processesin LNOI. This work looks into focused ion beam poling and demonstrates itspotential to overcome the limitations of electric field poling. We numericallyinvestigate the susceptibility of quasi-phase-matching condition to thefabrication flaws in poling periods and waveguide geometry showing its extremesensitivity. We demonstrate the precise fabrication of poling periods down to200 nm consistent over 3 mm length. Submicron poling of low loss LNOIwaveguides will unlock unprecedentedly efficient nonlinear interactions by theuse of uncomplicated LNOI components and enable the realization of mirrorlessoptical parametric oscillators.

Submicron domain engineering in periodically poled lithium niobate on insulator