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We report high qubit coherence as well as low crosstalk and single-qubit gateerrors in a superconducting circuit architecture that promises to be tileableto 2D lattices of qubits. The architecture integrates an inductively shuntedcavity enclosure into a design featuring non-galvanic out-of-plane controlwiring and qubits and resonators fabricated on opposing sides of a substrate.The proof-of-principle device features four uncoupled transmon qubits andexhibits average energy relaxation times $T_1=149(38)~\mu$s, pure echoeddephasing times $T_{\phi,e}=189(34)~\mu$s, and single-qubit gate fidelities$F=99.982(4)\%$ as measured by simultaneous randomized benchmarking. The 3Dintegrated nature of the control wiring means that qubits will remainaddressable as the architecture is tiled to form larger qubit lattices. Bandstructure simulations are used to predict that the tiled enclosure will stillprovide a clean electromagnetic environment to enclosed qubits at arbitraryscale.

High Coherence in a Tileable 3D Integrated Superconducting Circuit Architecture