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We present the physical concept and sample engineering design of a newminiature pressure sensor based on the whispering gallery modes (WGMs)optically excited in a dielectric microsphere placed near a flexible reflectivemembrane which acts as an ambient pressure sensing element. WGMs excitation iscarried out by free-space coupling of optical radiation to a microsphere. Thedistinctive feature of proposed sensor design is double excitation of opticaleigenmodes by forward and backward propagating radiation reflected from amembrane that causes WGMs interference in particle volume. The opticalintensity of resulting resonant field established in the microsphere carriesinformation about the exact position of the pressure-loaded reflectingmembrane. The sensitivity of the proposed sensor strongly depends on thequality factor of the excited resonant mode, as well as geometrical andmechanical parameters of the flexible membrane. Important advantages of theproposed sensor are miniature design (linear sensor dimensions depends only onthe membrane diameter) and the absence of a mechanical contact ofpressure-sensitive element with WGM resonator.

Concept of miniature optical pressure sensor based on coupled WGMs in a dielectric microsphere