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Energy-efficient programmable photonic integrated circuits (PICs) are thecornerstone of on-chip classical and quantum optical technologies. Opticalphase shifters constitute the fundamental building blocks which enable theseprogrammable PICs. Thus far, carrier modulation and thermo-optical effect arethe chosen phenomena for ultrafast and low-loss phase shifters, respectively;however, the state and information they carry are lost once the power is turnedoff-they are volatile. The volatility not only compromises energy efficiencydue to their demand for constant power supply, but also precludes them fromemerging applications such as in-memory computing. To circumvent thislimitation, we introduce a novel phase shifting mechanism that exploits thenonvolatile refractive index modulation upon structural phase transition ofSb$_{2}$Se$_{3}$, a bi-stable transparent phase change material. A zero-staticpower and electrically-driven phase shifter was realized on a foundry-processedsilicon-on-insulator platform, featuring record phase modulation up to 0.09$\pi$/$\mu$m and a low insertion loss of 0.3 dB/$\pi$, which can be furtherimproved upon streamlined design. We also pioneered a one-step partialamorphization scheme to enhance the speed and energy efficiency of PCM devices.A diverse cohort of programmable photonic devices were demonstrated based onthe ultra-compact PCM phase shifter.

Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials