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In this work, we analyze the creation of the discharge asymmetry and theconcomitant formation of the DC self-bias voltage in capacitively coupled radiofrequency plasmas driven by multi-frequency waveforms, as a function of theelectrode surface characteristics. For this latter, we consider and vary thecoefficients that characterize the elastic reflection of the electrons from thesurfaces and the ion-induced secondary electron yield. Our investigations arebased on Particle-in-Cell/Monte Carlo Collision simulations of the plasma andon a model that aids the understanding of the computational results. Electronreflection from the electrodes is found to affect slightly the dischargeasymmetry in the presence of multi-frequency excitation, whereas secondaryelectrons cause distinct changes to the asymmetry of the plasma as a functionof the phase angle between the harmonics of the driving voltage waveform and asa function the number of these harmonics.

Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas