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An approach is presented for the inversion of simulated and experimentalin-plane, co-polarized light scattering data in p and s polarization to obtainthe normalized surface-height autocorrelation function and the rms-roughness ofa two-dimensional randomly rough metal surface. The approach is based on anexpression, obtained on the basis of second-order phase perturbation theory,for the contribution to the mean differential reflection coefficient from thelight scattered diffusely by the rough surface. The inversion scheme isvalidated by using several sets of computer generated scattering data for roughsilver surfaces defined by Gaussian surface height correlation functions. Thereconstructions obtained by this approach are found to be rather accurate forweakly rough surfaces illuminated by p- and s-polarized incident light; this isalso true in cases where the contributions to the input data from multiplescattering of surface plasmon polaritons is not insignificant. Finally, theinversion scheme is applied to experimental scattering data obtained forcharacterized two-dimensional randomly rough gold surfaces, and the resultsobtained in this way, compare favorably to what is obtained by directlyanalyzing the surface morphology. Such results testify to the attractiveness ofthe computationally efficient inversion scheme that we propose.

Inversion of simulated and experimental light scattering data for characterization of two-dimensional randomly rough metal surfaces