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Flexible control of photons and phonons in silicon nanophotonic waveguides isa key feature for emerging applications in communications, sensing and quantumtechnologies. Strong phonon leakage towards the silica under-cladding hampersoptomechanical interactions in silicon-on-insulator. This limitation has beencircumvented by totally or partially removing the silica under-cladding to formpedestal or silicon membrane waveguides. Remarkable optomechanical interactionshave been demonstrated in silicon using pedestal strips, membrane ribs, andphotonic/phononic crystal membrane waveguides. Still, the mechanicalfrequencies are limited to the 1-5 GHz range. Here, we exploit the periodicnanostructuration in Si membrane gratings to shape GHz phononic modes andnear-infrared photonic modes, achieving ultrahigh mechanical frequency (10 GHz)and strong photon-phonon overlap (61.5%) simultaneously. Based on this concept,we experimentally demonstrate a one-dimension optomechanical micro-resonatorwith a high mechanical frequency of 10 GHz and a quality factor of 1000. Theseresults were obtained at room temperature and ambient conditions with anintracavity optical power below 1 mW, illustrating the efficient opticaldriving of the mechanical mode enabled by the proposed approach.

Generating 10-GHz phonons in nanostructured silicon membrane optomechanical cavity