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Optomechanical systems combine extreme sensitivity and bandwidth in thecontrol of mechanical motion, of interest for various applications. Integratedon a chip, actuated and detected all-optically by a single laser, they coulddisrupt sensing technologies. We introduce here a multiphysics model thatdescribes their operation in the oscillating mode, under sinusoidal modulationof the laser, when both photothermal forces and radiation pressure are present,and when nonlinear absorption occurs in the device. The model is validated bysystematic experiments on ultra-high frequency optomechanical disk resonatorsand leads to a quantitative assessment of the amplitude and phase of thedemodulated output signal, which carries the sensing information.

A multiphysics model for high frequency optomechanical sensors optically actuated and detected in the oscillating mode