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A novel thin-film LiNbO3 (TFLN) electro-optic modulator is proposed anddemonstrated. LiNbO3-silica hybrid waveguide is adopted to maintain low opticalloss for an electrode spacing as narrow as 3 {\mu}m, resulting in a record lowhalf-wave-voltage length product of only 1.7 V*cm. Capacitively loadedtraveling-wave electrodes (CL-TWEs) are employed to reduce the microwave loss,while quartz substrate is used in place of silicon substrate to achievevelocity matching. The fabricated TFLN modulator with a 5-mm-long modulationregion exhibits a half-wave-voltage of 3.4 V and merely 1.3 dB roll-off inelectro-optic response up to 67 GHz, and a 3-dB modulation bandwidth over 110GHz is predicted.

Low half-wave-voltage, ultra-high bandwidth thin-film LiNbO3 modulator based on hybrid waveguide and periodic capacitively loaded electrodes