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Aberration-corrected scanning transmission electron microscopy (STEM) iswidely used for atomic-level imaging of materials. To accelerate the discoveryof new materials based on atomic-level investigations, the throughput ofaberration-corrected STEM experiments becomes more and more important. However,the throughput of the full workflow of aberration-corrected STEM is still quitelow. A fundamental problem is that the preparation of high-quality thin STEMsamples (lamellae) depends on manual operation. Here, inspired by the recentsuccesses of "robot scientists", we demonstrate robotic fabrication ofhigh-quality lamellae by focused-ion-beam (FIB) with full automation software.First, we show that robotic FIB can prepare lamellae with a high success rate,where the robotic FIB controls rough-milling, lift-out, and final-thinningprocesses. Then, we optimize the FIB parameters of the final-thinning processfor single crystal Si. Aberration-corrected STEM imaging of these Si lamellaeshows atomic-level images with 55 pm resolution. We also demonstrate roboticfabrication of high-quality lamellae of SrTiO3 and sapphire. The robotic FIBsystem will resolve the current bottleneck of the full workflow ofaberration-corrected STEM analysis and accelerate materials discovery based onatomic-level imaging.

Robotic fabrication of high-quality lamellae for aberration-corrected transmission electron microscopy