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Displacement calibration of nanomechanical plate resonators presents achallenging task. Large nanomechanical resonator thickness reduces theamplitude of the resonator motion due to its increased spring constant andmass, and its unique reflectance. Here, we show that the plate thickness,resonator gap height, and motional amplitude of circular and elliptical drumresonators, can be determined in-situ by exploiting the fundamentalinterference phenomenon in Fabry-Perot cavities. The proposed calibrationscheme uses optical contrasts to uncover thickness and spacer height profiles,and reuse the results to convert the photodetector signal to the displacementof drumheads that are electromotively driven in their linear regime. Calibratedfrequency response and spatial mode maps enable extraction of the modal radius,effective mass, effective driving force, and Young's elastic modulus of thedrumhead material. This scheme is applicable to any configuration ofFabry-Perot cavities, including plate and membrane resonators.

Fabry-Perot Interferometric Calibration of 2D Nanomechanical Plate Resonators