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Microelectromechanical system (MEMS) focal plane array (FPA) with opticalreadout offers exciting opportunities for real-time terahertz (THz) imaging.However, conventional FPA suffers from a low THz absorption ratio, whichfurther decreases the performance of THz imaging. Here, we present a simple andscalable approach for the realization of THz focal plane metamaterial arraywith a relatively high absorption ratio. The key idea is to combine theadvantages of substrate-free structures with metamaterial. A 100 x100 THz FPAwith a 150 x 150 {\mu}m pixel is designed, fabricated, and characterized. Thedependence of the THz absorption ratio on the thickness of SiNx dielectricsubstrate film is investigated. The fabricated FPA exhibits a 90.6% resonantabsorption at 1.36 THz, agreeing considerably with the theoretical simulationresults. Our results imply that such a substrate-free THz focal planemetamaterial array enables the realization of THz imaging.

Substrate-free THz focal plane metamaterial array with high absorption ratio