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We demonstrate simultaneous measurements of the charge state, energy andangular distribution of keV ions in transmission experiments throughself-supporting foils. Using a time-of-flight approach we have introduced anelectrostatic deflection apparatus as an extension to existing medium energyion scattering (MEIS) instrumentation. Different positive, neutral and negativecharge states have been discriminated and quantified for initially singlycharged beams of He, N, O and Ne in the energy range from 25 to 250 keV. Inparallel, the ion energy after interaction with the target has been assessedfor all detected particles, while particles can be discriminated by deflectionangle. Self-supporting thin carbon foils were used as samples to benchmark ourexperiments with literature data where available.

Simultaneous assessment of energy, charge state and angular distribution  for medium energy ions interacting with ultra-thin self-supporting targets: a  time-of-flight approach