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A mid-infrared single photon detector (MIR-SNSPD) was reported based on 30nm-wide superconductor molybdenum silicide nanowires in this work. Saturatedquantum efficiencies (QEs) were achieved at the wavelength ranging from 1.55 to5.07 micrometer in experiments. At the same time, the intrinsic dark count rate(DCR) was below 100 cps. Thus, this device produced a noise equivalent power(NEP) of 4.5 * 10-19 W/sqrt(Hz). The results provide the foundation ofdeveloping 10 micrometer-SNSPD for the applications of infrared astronomyobservation.

Mid-infrared single photon detector with superconductor Mo$_{80}$Si$_{20}$ nanowire