English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Plus monthly

Global: Zendy Tools annual

Global: Zendy Tools monthly

Global: Zendy Free Plan

We report a robust fabrication method for patterning free-standing Ptnanowires for the use as thermal anemometry probes for small-scale turbulencemeasurements. Using e-beam lithography, high aspect ratio Pt nanowires (~300 nmwidth, ~70 $\mu$m length, ~100 nm thickness) were patterned on the surface ofoxidized silicon (Si) wafers. Combining precise wet etching processes with dryetching processes, these Pt nanowires have been successfully releasedfree-standing between two silicon dioxide (SiO2) beams supported on Sicantilevers. Moreover, the unique design of the bridge holding the deviceallowed to release the device gently without damaging the Pt nanowires. Thetotal fabrication time was minimized by restricting the use of e-beamlithography to the patterning of the Pt nanowires while standardphotolithography was employed for other parts of the devices. We demonstratethat the fabricated sensors are suitable for turbulence measurements whenoperated in a constant-current mode. A robust calibration between outputvoltage and fluid velocity was established over the velocity range from 0.5 ms-1 to 5 m s-1 in an SF6 atmosphere at a pressure of 2 bar and a temperature of21{\deg}C. The sensing signal from the nanowires showed negligible drift over aperiod of several hours. Moreover, we confirmed that the nanowires are able towithstand high dynamic pressures by testing them in air at room temperaturevelocities up to 55 m/s.

Fabrication of free-standing Pt nanowires for use as thermal anemometry probes in turbulence measurements