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In this work we present results acquired by applying magnetic field imagingtechnique based on Nitrogen-Vacancy centres in diamond crystal forcharacterization of magnetic thin films defects. We used the constructedwide-field magnetic microscope for measurements of two kinds of magneticdefects in thin films. One family of defects under study was a result ofnon-optimal thin film growth conditions. The magnetic field maps of severalregions of the thin films created under very similar conditions to previouslypublished research revealed microscopic impurity islands of ferromagneticdefects, that potentially could disturb the magnetic properties of the surface.The second part of the measurements was dedicated to defects created postdeposition - mechanical defects introduced in ferromagnetic thin films. In bothcases, the measurements identify the magnetic field amplitude and distributionof the magnetic defects. In addition, the magnetic field maps were correlatedwith the corresponding optical images. As this method has great potential forquality control of different stages of magnetic thin film manufacturing processand it can rival other widely used measurement techniques, we also proposesolutions for the optimization of the device in the perspective of highthroughput.

Characterization of microscopic ferromagnetic defects in thin films using magnetic microscope based on Nitrogen-Vacancy centres