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Microwave sensors can probe intrinsic material properties of analytes in amicrofluidic channel at physiologically relevant ion concentrations. Whilemicrowave sensors have been used to detect single cells and microparticles inearlier studies, the synergistic use and comparative analysis of microwavesensors with optical microscopy for material classification and size trackingapplications have been scarcely investigated so far. Here we combined microwaveand optical sensing to differentiate microscale objects based on theirdielectric properties. We designed and fabricated two types of planar sensor: aCoplanar Waveguide Resonator (CPW) and a Split-Ring Resonator (SRR). Bothsensors possessed sensing electrodes with a narrow gap to detect single cellspassing through a microfluidic channel integrated on the same chip. We alsoshow that standalone microwave sensors can track the relative changes incellular size in real-time. In sensing single 20-micron diameter polystyreneparticles, Signal-to-Noise ratio values of approximately 100 for CPW and 70 forSRR sensors were obtained. These findings demonstrate that microwave sensingtechnology can serve as a complementary technique for single-cell biophysicalexperiments and microscale pollutant screening.

High Resolution Dielectric Characterization of Single Cells and Microparticles Using Integrated Microfluidic Microwave Sensors