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We demonstrate a-axis YBa2Cu3O7-x/PrBa2Cu3O7-x/YBa2Cu3O7-x trilayers grown on(100) LaAlO3 substrates with improved interface smoothness. The trilayers aresynthesized by ozone-assisted molecular-beam epitaxy. The thickness of thePrBa2Cu3O7-x layer is held constant at 8 nm and the thickness of theYBa2Cu3O7-x layers is varied from 24 nm to 100 nm. X-ray diffractionmeasurements show all trilayers to have >95% a-axis content. The rms roughnessof the thinnest trilayer is < 0.7 nm and this roughness increases with thethickness of the YBa2Cu3O7-x layers. The thickness of the YBa2Cu3O7-x layersalso affects the transport properties: while all samples exhibit an onset ofthe superconducting transition at and above 85 K, the thinner samples showwider transition widths, {\Delta}Tc. High-resolution scanning transmissionelectron microscopy reveals coherent and chemically sharp interfaces, and thatgrowth begins with a cubic (Y,Ba)CuO3-x perovskite phase that transforms intoa-axis oriented YBa2Cu3O7-x as the substrate temperature is ramped up.

a-axis YBa2Cu3O7-x/PrBa2Cu3O7-x/YBa2Cu3O7-x trilayers with subnanometer rms roughness