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Effects of radio-frequency power and driven frequency on the two-dimensional(axial and radial) distributions of electron density and temperature wereexperimentally investigated in low pressure capacitively coupled argon plasmas.The intensity profiles of 696.5 nm and 750.4 nm emission lines were detected byemploying a spatially resolved diagnostic system, which consists of a chargecoupled device (CCD) and bandpass interference filters. The two-dimensionaldistributions of electron density and electron temperature were calculated fromthe spatial distributions of emission intensities via a collisional radiativemodel (CRM). It is found that the axial and radial distributions of electrondensity are more uniform at a lower RF power. The axial uniformity of electrondensity is better at a lower driven frequency, while the radial profiles ofelectron temperature is flatter at a higher excitation frequency. In all thecases, the electron temperature is extremely uniform in the bulk plasma.Moreover, a mode transition from the {\alpha} to the {\gamma} mode is observedwith the increase of input RF power at 13.56 MHz, which causes a significantincrease of electron density and an abrupt decrease of electron temperature.

Diagnosis of electron density and temperature by using collisional  radiative model in capacitively coupled Ar plasmas II: two-dimensional  distributions