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An 18-level argon collisional radiative model (CRM) suitable for low pressurewas established. The model can be solved by combining the optical emissionspectroscopy (OES) with Langmuir probe calibration. In the capacitively coupledplasmas (CCPs) with different frequency and power, the electron temperature anddensity obtained by the model were compared with those measured by Langmuirprobe. It is found that the calibration point at any frequency or power issuitable for the fixed pressure. This method was then applied to the diagnosisof triple-frequency (TF) CCPs, it is shown that the high frequency (HF) powermainly controls the electron density, the low frequency (LF) power mainlycontrols the electron temperature, and the intermediate frequency (IF) powerwas between the two. Compared with the dual-frequency (DF) CCPs, it is foundthat with the increase of IF power, the HF power can control the electrondensity more independently with less influence on the electron temperature.

Diagnosis of electron density and temperature by using collisional radiative model in capacitively coupled Ar plasmas I: triple-frequency discharges