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We present a detailed analysis of electron trajectories within the sheathregions of capacitively coupled plasmas excited by radio-frequency voltagewaveforms at low pressures. Complex features inside the sheaths are identifiedin several physical quantities, which are sculptured by the trajectories of thebouncing electrons under the influence of the spatio-temporally varyingelectric field. A method is developed to explain the generation of the variousfeatures as a function of surface processes and to identify the trajectories ofelectrons of different origin.

Electron tennis driven by radio-frequency electric fields in low-pressure plasma sources