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We present high-reflectivity substrate-transferred single-crystal GaAs/AlGaAsinterference coatings at a center wavelength of 4.54 um with record-low excessoptical loss below 10 parts per million. These high-performance mirrors arerealized via a novel microfabrication process that differs significantly fromthe production of amorphous multilayers generated via physical vapor depositionprocesses. This new process enables reduced scatter loss due to the low surfaceand interfacial roughness, while low background doping in epitaxial growthensures strongly reduced absorption. We report on a suite of opticalmeasurements, including cavity ring-down, transmittance spectroscopy, anddirect absorption tests to reveal the optical losses for a set of prototypemirrors. In the course of these measurements, we observe a uniquepolarization-orientation-dependent loss mechanism which we attribute to elasticanisotropy of these strained epitaxial multilayers. A future increase in layercount and a corresponding reduction of transmittance will enable opticalresonators with a finesse in excess of 100 000 in the mid-infrared spectralregion, allowing for advances in high resolution spectroscopy, narrow-linewidthlaser stabilization, and ultrasensitive measurements of various light-matterinteractions.

Mid-infrared monocrystalline interference coatings with excess optical loss below 10 ppm