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Photonic crystal (PhC) nanocavities have demonstrated unique capabilities interms of light confinement and manipulation. As such, they are becomingattractive for the design of novel resonance-based photonic integrated circuits(PICs). Here two essential challenges arise however - how to realizeultrahigh-Q PhC cavities using standard fabrication processes compatible withlarge volume fabrication, and how to efficiently integrate them with otherstandard building blocks, available in exiting PIC platforms. In this work, wedemonstrate ultrahigh-Q 1D PhC nanocavities fabricated on a 300 mm SOI wafer byoptical lithography, with a record Q factor of up to 0.84 million. Moreover, weshow efficient mode management in those oxide embedded cavities by couplingthem with an access waveguide and realize two critical components: notchfilters and narrow-band reflectors. In particular, they allow bothsingle-wavelength and multi-wavelength operation, at the desired resonantwavelengths, while suppressing all other wavelengths over a broad wavelengthrange (>100 nm). Compared to traditional cavities, this offers a fantasticstrategy for implementing resonances precisely in PIC designs with more freedomin terms of wavelength selectivity and the control of mode number. Given theircompatibility with optical lithography and compact footprint, the realized 1DPhC nanocavities will be of profound significance for designing compact andnovel resonance-based photonic components on large scale.

Efficient resonance management in ultrahigh-Q one-dimensional photonic crystal nanocavities fabricated on 300 mm SOI CMOS platform