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In order to design broadband extreme ultraviolet multilayers with manyobjectives, the multiobjective genetic algorithm and the multiobjectivegenetics algorithm with reference direction have been improved and combinedused. The certain conflicting relations between three primary design objectiveshave been obtained by analyzing the distribution of nondominated solutions, andthe multilayer designs with critical average reflectivities have been found.Basing on the multiobjective genetics algorithm with reference direction, theexact multilayer design has been obtained by guiding the searching in desiredregion of solution space. Our method can supply the multilayer designs whichare the optimal trade-offs among these design objectives, and it has a greatpotential in designing optical multilayers with more objectives.

Multiobjective optimization in design of broadband extreme ultraviolet multilayers