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We have investigated a water-stable sol-gel method based on ethylene glycolas a solvent and bridging ligand for the synthesis of ferroelectric leadzirconate titanate in bulk and thin film forms. This method offers lowertoxicity of the solvent, higher stability towards atmospheric moisture and asimplified synthetic procedure compared to traditional sol-gel methods. Ceramicpellets of Nb-doped lead zirconate titanate (PNZT) in the rhombohedral phasewere produced with high density and good piezoelectric properties, comparableto those reported in the literature and those found in commercial piezoelectricelements. In addition, a nine-layer thin film stack was fabricated from thesame sol by spin coating onto platinized silicon substrates. The films werecrack-free and showed a dense perovskite grain structure with a weak (111)orientation. Piezoelectric measurements of the film showed a piezoelectriccoefficient comparable to literature values and good stability towards fatigue.

Ferroelectric PbZr$_{1-x}$Ti$_x$O$_3$ by ethylene glycol-based chemical solution synthesis