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While Atomic Force Microscopy is mostly used to investigate surfaceproperties, people have almost since its invention sought to apply its highresolution capability to image also structures buried within samples. One ofthe earliest techniques for this was based on using ultrasound excitations tovisualize local differences in effective tip-sample stiffness caused by thepresence of buried structures with different visco-elasticity from theirsurroundings. While the use of ultrasound has often triggered discussions onthe contribution of diffraction or scattering of acoustic waves in visualizingburied structures, no conclusive papers on this topic have been published. Herewe demonstrate and discuss how such acoustical effects can be unambiguouslyrecognized and can be used with Atomic Force Microscopy to visualize deeplyburied structures.

Scattering contrast in GHz frequency ultrasound subsurface atomic force microscopy for detection of deeply buried features