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We measured the local composition and thickness of SiO2-based glass materialfrom diffraction. By using four dimensional scanning transmission electronmicroscopy (4D-STEM), we obtained diffraction at each scanning point. Comparingthe obtained diffraction with simulated diffraction patterns, we try to measurethe local composition and thickness. Although this method requires someconstraints, this method measured local composition and thickness with 1/10 orless electron dose of EELS.

Local thickness and composition measurements from scanning  convergent-beam electron diffraction of a binary non-crystalline material  obtained by a pixelated detector